علية عبدالمحسن شهاب
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Alia AA Shehab
PhD
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professor
College of Education for Pure Sciences (Ibn Al-Haitham)
,
Department of Physics
[email protected]
Publication Date
Tue Jan 01 2019
Journal Name
Energy Procedia
Design and Construction of Nanostructure TiO2 Thin Film Gas Sensor Prepared by R.F Magnetron Sputtering Technique
In this research, Mn-doped TiO2 thin films were grown on glass, Si and OIT/glass substrates by R.F magnetron sputtering technique with thicknesses (250 nm) using TiO2:Mn target under Ar gas pressure and power of 100 Watt. Through the results of X-ray diffraction, the prepared thin films are of the polycrystallization type after the process of annealing at 600°C for two hour The average crystalline size were 145.32, 280.97 and 261.23 nm for (TiO2:Mn) thin film on glass, Si and OIT/glass substrates respectively, while the measured surface roughness is between 0.981nm and 1.14 nm. The fabricated (TiO2:Mn) thin film on glass sensors have high sensitivity for hydrogen( H2 reducing gas) compared to the sensitivity for hydrogen gas on Si and OIT/
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Publication Date
Mon Jan 01 2018
Journal Name
Aip Conference Proceedings
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Publication Date
Tue Jan 01 2019
Journal Name
Energy Procedia
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Publication Date
Tue Jan 01 2019
Journal Name
Energy Procedia
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