The influence of 5-10 kHz audio frequency on the power dissipation in ac discharge of argon gas was studied experimentally, at pressures 50-80 mTorr and electrodes separation 10 cm (pd range 0.5-0.8 Torr.
cm). The measurements have shown that the discharge behavior in the ac circuit is equivalent to a series RC circuit. It is observed that the variation curve of discharge power P with the frequency f is approximately has a Gaussian shape. It is also observed that the curve of Pm- pd is the inverse of Paschen curve, where Pm is the maximum power in the frequency range. The time of breakdown is estimated from the curve of P- f.
An experimental investigation of the variation of argon discharge current with a glow and afterglow time intervals of a square discharge voltage was carried out at low pressure (6-11 mbar). The discharge was created between two circular metal electrodes of diameter (7.5 cm), separated horizontally by a distance (10 cm) at the two ends of a Pyrex cylindrical tube. A composite of two Gaussian functions has been suggested to fit and explain the variation graphs clearly. It is shown that the necessary times of glow and afterglow needed to attain a maximum discharge current are (70 us) and (60 us), respectively. The discharge current is observed to drop to the lowest value when the two times are serially longer than (85 us) and (72 u
... Show MoreThe magnetic field effect on the current-voltage characteristic curves of glow discharge in argon at low pressures has been experimentally investigated. The electrical discharge was ignited in a stainless steel tapered chamber of a nominal volume of 0.5m3 immersed inside a water-cooled coil capable of delivering a magnetic field of strength B of up to 0.42T. Three water-cooled electrodes were inserted into the chamber up to a point where their tips were 20cm away from the surface of the central column of the chamber. An enhancement of the electric field configuration within the region of the electrode assembly was performed by threading one of the electrodes with stainless circular discs(80mm and 140mm in diameter) in various forms(attac
... Show MoreLow-pressure capacitively coupled RF discharge Ar plasma has been studied using Langmuir probe. The electron temperature, electron density and Debay length were calculated under different pressures and electrode gap. In this work the RF Langmuir probe is designed using 4MHz filter as compensation circuit and I-V probe characteristic have been investigated. The pressure varied from 0.07 mbar to 0.1 mbar while electrode gap varied from 2-5 cm. The plasma was generated using power supply at 4MHz frequency with power 300 W. The flowmeter is used to control Argon gas flow in the range of 600 standard cubic centimeters per minute (sccm). The electron temperature drops slowly with pressure and it's gradually decreased when expanding the electro
... Show MoreAbstract- Plasma parameters in a planar dc-sputtering discharge in argon were measured by cylindrical electrostatic probe (Langmuir probe).Electron density, electron temperature, floating potential, and space potential were monitored as a function of working discharge pressure. Electrostatic probe and supporting circuit were described and used to plot the current – voltage characteristics. Plasma properties were inferred from the current-voltage characteristics of a single probe positioned at the inter-cathode space. Typical values are in the range of (10-16 -10-17) m-3 and (2.93 – 5.3) eV for the electron density and the electron temperature respectively.
To add more details about the effect of the axial magnetic field on the plasma profile, the breakdown voltage of air was investigated at low pressure (9-15 Pa) in the presence of axial magnetic field (0.01-0.04T). The air was ignited by a DC voltage between two plain electrodes of aluminum separated by a distance (8.5cm). The measurements showed that the discharge voltage decreases to a minimum value, then returns to increase over the minimum with increasing the magnetic field strength, at all pressures in the range. It was also observed that a maximum decrease in the discharge voltage is obtained near the minimum of Paschen curve from the right side. The decrease in the discharge voltage was caused mainly by the effect of magnetic
... Show MoreThe current study involves an experimental investigation of plasma main parameters of a DC discharge with a hollow cathode (HCD) geometry in air using apertures of different diameters from the hollow cathode (1, 1.5, 2, and 2.5 cm). A tiny Langmuir probe is used to investigate the plasma properties. The HCD was operated at constant power of 12.4 W and gas pressures ranging between 0.1 to 0.8 torr. It was observed that the operational conditions strongly affect the electron temperature and density, while the hollow cathode diameter has not much influence. The main important observation was that at relatively high air pressure (>0.4 torr) two electron temperatures were obtained, while at relatively low pressure (<0.4 torr)
... Show MoreIn the present work, the effect of size of zinc dust particles on
AC argon discharge characteristics are investigated
experimentally. The plasma characteristics are determined by
using optical emission spectroscopy (OES) techniques. The
results illustrated that the electron temperature (Te) in the present
and absent of Zinc dust particle is reduced with increasing of
pressure. The electron temperature decreases with increasing of
Zinc dust size. Excitation temperature Tex is reduces with
increasing of Ar pressure in present and absent of zinc dust
particles. The present of Zinc dust reduce the Tex of Ar in both
Zinc dust size. The electron density increasing in the present and
absent of both zinc dust siz
In this paper, we investigate the basic characteristics of "magnetron sputtering plasma" using the target V2O5. The "magnetron sputtering plasma" is produced using "radio frequency (RF)" power supply and Argon gas. The intensity of the light emission from atoms and radicals in the plasma measured by using "optical emission spectrophotometer", and the appeared peaks in all patterns match the standard lines from NIST database and employed are to estimate the plasma parameters, of computes electron temperature and the electrons density. The characteristics of V2O5 sputtering plasma at multiple discharge provisos are studied at the "radio frequency" (RF) power ranging from 75 - 150 Wat
... Show MoreThe main goal of this work is to obtain the plasma electron temperature Te by optical emission spectroscopy of low pressure microwave argon plasma, as a function of working pressure and microwave power. A plasma system was designed and constructed in our laboratory using a magnetron of domestic microwave oven with power 800W without any commercial part. The applied voltage on the magnetron electrical circuit is changed for the purpose of obtaining the variable values of the microwave power. The spectral detection is performed with a spectrometer of wavelength range (200−1000nm). The working pressure and magnetron applied voltage were 0.3-3.0mbar and 180-240V, respectively. Two methods had been applied to estimate the electron temperatu
... Show MoreA gliding arc discharge (GAD) with a water spray system was constructed. A non-thermal plasma, generated between two V shaped electrodes in an ambient argon driven by 100 Hz AC voltage, was investigated using optical emission spectroscopy (OES) with different gas flow rates (0.5, 1, 1.5, 2 , 2.5 , 3 1/min). Boltzmann plot method was used to calculate electron temperature (Te) and electron density (ne). The electrodes design was spectrally recognized and its Te value was about 0.588-0.863 eV, while the ne value of 6.875×1017-10.938×1017 cm-3. The results of the plasma diagnostics generated by gliding arc showed that increasing gas f
... Show More