Employment of Titanium dioxide thin film on NO2 gas sensing
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Abstract<p>TiO<sub>2</sub> thin films were deposited by Spray Pyrolysis with thickness ((350±25) nm) onto glass substrates at (350°C), and the film was annealed at temperatures (400 and 500)°C. The structural and morphological properties of the thin films (TiO<sub>2</sub>) were investigated by X-ray diffraction, Field emission scanning electron microscopy and atomic force microscope. The gas sensor fabricated by evaporating aluminum electrodes using the annealed TiO<sub>2</sub> thin films as an active material. The sensitivity of the sensors was determined by change the electrical resistance towards NO<sub>2</sub> at different working temperatures (200 and 300)°C. It was determined that the fabricated sensor using TiO<sub>2</sub> thin film annealed at (400)<italic>°C</italic> with 8.28 nm particle size has high sensitivity than the thin films annealed at 500°C with 10.37 nm particle size. The sensor operated at 200°C had also sensitive to the NO<sub>2</sub> gas and its sensivity increased with operated temperatures at 300°C. It was observed that the fabricated sensors exhibited reproducible and stable results.</p>
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